Match the words with the synonyms (text A)

Make sure you know the meanings of these words. Match the words with their definitions.

Answer the questions to text B.

Decide whether the following statements are true or false according to text B.

1. One of the advantages of early magnetron sources was that the plasma was trapped near the surface.

2.The unbalanced magnetron allows plasma to be created in regions away from the target surface.

3. The plasma generation area can be increased when the escaping magnetic field is linked to other unbalanced magnetron sources.

4. The growth morphology of the deposited coating could be examined with the invention of the scanning microscope.

5. The sputtering pressure determines the flex.

6. The structure zone model was never refined.

1. What can you say of unbalanced magnetron?

2. When can the plasma generation be significantly increased?

3. When did it become possible to examine the growth morphology of the deposited coating?

4. What does the ‘Thornton Diagram’ illustrate?

6. What became possible with the invention of scanning electron microscope?

7. What does stand for the abbreviation “SEM”?

8. What does the sputtering pressure determine?

9. What does stand for the abbreviation “SZM”?

10. How high can be the pressure in the sputtering chamber?

Comprehension Check – 2

9. Fill in the correct prepositions, then choose any of samples and make the complete sentences. Look through the texts A and B again.

1) magneticfields were parallel __ the sputtering target surface

2) the confined electrons were used __ developing the “surface magnetron” sputtering configuration.

3)Clarke developed a sputtering source using a magnetic tunnel __ the inside __a cylindrical surface

4)Chapin is credited __being the inventor of the planar magnetron

5)the ion bombardment of the substrate was low that resulted __ poor quality films.

6)the problem was partially solved __ adding auxiliary ionization

7)Thornton published the SZM model __evaporated coatings.

8)the diagram is known __ the ‘Thornton Diagram’

a) density; b) deposit; c) film; d) flux; e) fusion; f) invent

1) relation of weight to volume and is measured in units of kilograms per cubic meter.

2) a substance added to a solid to assist in its fusion.

3) a mixing or uniting of different things into one.

4) create or design something not existing before.

5) a thin layer or coating.

6) a coating of metal deposited on something, usually by an electric current.

1) realize 5) low a) accomplish e) arise

2) continue 6) superior b) employ f) upper

3) use 7) widespread c) persist g) prevalent

4) emerge 8) major d) weak h) chief

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